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Electron beam observation device using a pre-specimen magnetic field as image-forming lens and specimen observation method
Electron beam observation device using a pre-specimen magnetic field as image-forming lens and specimen observation method
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机译:利用标本磁场作为成像透镜的电子束观察装置及标本观察方法
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摘要
An electron beam observation device includes a mechanism which disposes a specimen at an upstream side in an electron beam traveling direction outside an objective lens, from which an image is transferred under a magnification of 1/5 to 1/30, in addition to an inside of the objective lens in which a specimen is disposed at a time of ordinary observation.
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