MOLD, METHOD FOR PRODUCTION OF THE MOLD, AND METHOD FOR PRODUCTION OF SUBSTRATE HAVING REPLICATED FINE PATTERN

摘要

To provide a mold having optical transparency, release properties, mechanical strength, dimension stability and a highly precise micropattern, and having less deformation of the micropattern; and a process for producing a base material with a transferred micropattern having less deformation of the transferred micropattern, capable of transferring highly precise micropattern of the mold.A mold 10 comprising a transparent substrate (A)12 having chemical bonds based on the functional groups (x) on the surface having an interlayer (C)14 formed, having a difference in linear expansion coefficient (absolute value) of less than 30 ppm/°C from the linear expansion coefficient of the following fluoropolymer (I), and further having a heat distortion temperature of from 100 to 300°C; an interlayer (C)14 made of a fluoropolymer (II) having a fluorinated alicyclic structure in its main chain and further having reactive groups (y) reactive with the functional groups (x); and a surface layer (B)16 having a micropattern on the surface, made of a fluoropolymer (I) having a fluorinated alicyclic structure in its main chain and having substantially no reactive groups (y).