TEMPERATURE SENSOR DEVICE AND RADIATION THERMOMETER USING SAME, METHOD FOR PRODUCING TEMPERATURE SENSOR DEVICE, MULTILAYERED THIN FILM THERMOPILE USING PHOTORESIST FILM AND RADIATION THERMOMETER USING SAME, AND METHOD FOR PRODUCING MULTILAYERED THIN FILM THERMOPILE

摘要

Provided are: a high output and high S/N thermopile wherein the internal resistance (r) of the thermopile is not so enlarged but the total number (n) of thermocouples is increased; a high-sensitive radiation thermometer; a method for manufacturing the thermopile using a thin film formed of an organic material; a uniform, low-cost and high-sensitive multilayered thin film thermopile; a high-sensitive radiation thermometer; and a method for producing the multilayered thin film thermopile. A temperature sensor device provided with a thermopile formed in a thin film which is located in a temperature-sensitive part, said thin film being thermally separated from a substrate, wherein said thin film is a multilayered thin film provided with layer thermopiles respectively in the individual thin film layers and the layer thermopiles serve as a substrate heat sink to form one of the junctions, i.e., the standard temperature of the thermopile. The individual layer thermopiles are successively connected in series to form a composite thermopile. The series connection is designed so as to give a large output. By using the composite thermopile as a temperature sensor device, the radiation thermometer is manufactured.