METHOD OF USING ISOLATION DC-DC, MCU AND OPTO-COUPLER IN INTELLIGENT HIGH-PRECISION HIGH-VOLTAGE POWER SUPPLY FOR AN ION BEAM AND AN ELECTRON BEAM CONTROL

摘要

PURPOSE: A method of using isolation DC-DC, MCU and opto-coupler in intelligent high-precision high-voltage power supply for an ion beam and an electron beam control are provided to electrically isolate high voltage and low voltage by using an opto-coupler to transmit the signal of a high voltage part and a low voltage part.;CONSTITUTION: A power supply unit supplies floating power to as the controller of a floating electrode. The power supply unit electrically isolates from the output value of the floating electrode through an opto-coupler. The power supplies receives a feedback signal. A controller and an output unit has an MCU to perform precise control. The controller is comprised of an ACC voltage controlling part, a heater, and an Ext and a Sup voltage controlling part.;COPYRIGHT KIPO 2011