MID-VOLTAGE SEMICONDUCTOR ELEMENT ARRAY, WHICH IS USED FOR A MID-VOLTAGE DIGITAL-TO-ANALOG CONVERTER SWITCH CIRCUIT

摘要

PURPOSE: A mid-voltage(MV) semiconductor element array is provided to reduce the width of gates and the distances of elements in order to minimize the size of a chip by obtaining a switch circuit using the MV semiconductor element array.;CONSTITUTION: A plurality of element isolation regions(110) is formed on a semiconductor substrate(100). A gate(130) is formed on the active region which is between the element isolation regions. Spacers(150) are formed at both sides of the gate. A source region(122) and a drain region are formed on the active region which is at both sides of the spacers. An insulating layer(160) is formed on the entire surface of the semiconductor substrate.;COPYRIGHT KIPO 2011