GLASS ELECTROSTATIC CHUCK AND A METHOD FOR MANUFACTURING THE SAME, CAPABLE OF ALLEVIATING THERMAL STRESS BETWEEN A GLASS PLATE AND A METAL SUPPORT USING GEL-BASED ADHESIVE

摘要

PURPOSE: A glass electrostatic chuck and a method for manufacturing the same are provided to obtain a large sized electrostatic chuck with the improved mechanical intensity by including a dielectric plate based on glass.;CONSTITUTION: A dielectric plate(100) is based on glass. An electrode(101) is arranged at inside or one side of the dielectric plate. A metal support(104) is bonded with the dielectric plate using gel-based adhesive. An insulating layer(102) is formed at the lower side of the electrode in order to insulating the electrode and the metal support. An adhesive layer(103) is formed between the insulating layer and the metal support.;COPYRIGHT KIPO 2011