OPTICAL ELEMENT, METHOD OF PLANARIZING OPTICAL FILM AND METHOD OF MANUFACTURING THE OPTICAL ELEMENT

摘要

[PROBLEMS] when the optical film is formed on a thin substrate, for forming a thin film without special modifications, thereby relieve film stress in the optical film according to the purpose of planning the optical film is flattened. ; [MEANS FOR SOLVING PROBLEMS] In order to alleviate the stress of the reflective multilayer film (12), the blood of the transparent substrate 10 to have a difference in the roughness of the surface on the film forming surface (10S) and blood sliding surface (10R), blood film forming surface (10S) is formed with a reflective multilayer film 12, blood sliding surface (10R) and a sliding surface sliding cotton 13 are formed. Reflective multilayer film 12 is a film having a stress, so to generate the deformation of the convex direction of the film-forming surface 10, and a sliding surface 13 sliding surface and the stress due to the action agent Wyman effect by being formed (13 ) to generate a strain in the direction of projection. Because the film stress and stress due to the sliding surface is curved in opposite directions to each other to form, by removing the stress to each other thereby flattened multilayer film 12, the reflection.