THE BATCH TYPE FINAL CLEANING EQUIPMENT FOR SILICON SOLAR CELL WAFERS

摘要

PURPOSE: A cleaning apparatus for a silicon solar cell is provided to maximize the elimination efficiency of residue on the surface of a wafer using ultrasonic energy. CONSTITUTION: An ultrasonic generator is equipped in a loader part(1). The ultrasonic generator(7) implements a cleaning function using ultrasonic energy. The cleaning efficiency is maximized based on the cleaning function using the ultrasonic energy. The ultrasonic generator effectively eliminates residue which is remained on the surface of wafer after a wire-sawing process. A defect rate is rapidly reduced.