LITHOGRAPHY APPARATUS FOR DETECTING THE TWO PHASE FLOW AND A METHOD OF MEASURING THE SPEED OF TWO PHASE FLOW

摘要

PURPOSE: A lithography apparatus for detecting the two phase flow and a method of measuring the speed of two phase flow are provided to measure the gas flow and speed of the liquid flow using the flow meter after separating the two phase flow into the gas flow and the liquid flow.;CONSTITUTION: A flow separator separates the two phase flow into the gas flow and the liquid flow. A first flow meter(260) measures the fluid flow speed of the gas flow or the liquid flow. A second flow meter(262) measures the fluid flow speed of the other out of the gas flow and the liquid flow. The first and second flow meters offer the signal showing the measured speed to a controller(300).;COPYRIGHT KIPO 2011