POLYSILAZANE TREATMENT SOLVENT WITH EXCELLENT STABILITY WHICH CAN CHEMICALLY REMOVE RESIDUAL POLYSILAZANE COATING AND A METHOD FOR TREATING POLYSILAZANE USING THE SAME

摘要

PURPOSE: A polysilazane treatment solvent is provided to enable use in edge cutting and backside rinsing due to high polysilazane solubility and to reduce the amount of gas generated from a waste liquid tank.;CONSTITUTION: A polysilazane treatment solvent is a mixture of two or more of the following: toluene, heptanes, and etherified. The etherified material is selected from diethyl ether, ethyl phenyl ether, diisopropylether, diisopentylether, or their mixture. A method for treating polysilazane comprises the steps of: applying the polysilazane treatment solvent to a substrate(110); and removing polysilazane by spraying the polysilazane treatment solvent to the polysilazane(130) of filtrate(140) or protrusion.;COPYRIGHT KIPO 2011