INORGANIC SENSOR WITH LOWERED DETECTION LIMIT OF INORGANIC ACID, CONTAINING LIGHT EMITTING ORGANIC METAL COMPOUNDS

摘要

PURPOSE: An inorganic sensor and a sensing device using the same are provided to immediately detect trace amount of inorganic acid in case of manufacturing semiconductor process or metal-related process.;CONSTITUTION: An inorganic acid sensor contains luminescent organic metal compounds. The organic metal compound is metalol of chemical formula 1. The inorganic acid is one or more acids selected from hydrochloric acid, sulfuric acid, nitric acid, hydrofluoric acid(HF), bromic acid, and iodic acid(HI). An inorganic acid sensing device contains the inorganic sensor which is diluted in a solvent. The device is a strip type inorganic acid sensing device.;COPYRIGHT KIPO 2011