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METHOD OF EVALUATING AN OPTICAL SYSTEM, CAPABLE OF EVALUATING THE OPTICAL SYSTEM WITHOUT A LIGHT EXPANDING UNIT
METHOD OF EVALUATING AN OPTICAL SYSTEM, CAPABLE OF EVALUATING THE OPTICAL SYSTEM WITHOUT A LIGHT EXPANDING UNIT
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机译:评估光学系统的方法,能够在没有光扩展单元的情况下评估光学系统
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摘要
PURPOSE: A method of evaluating an optical system is provided to enable the profile, distortion and illuminance of a spot to be simultaneously measured since the position of the spot can be estimated using a wave function.;CONSTITUTION: A method of evaluating an optical system is as follows. A spot, which passes through a lens unit, is formed using a lighting unit(S410). The spot is defocused. The intensities of defocused lights on at least two positions are measured using a sensor unit(S420). The information of the spot is obtained using the measured intensities of the lights. The information of the spot is obtained by the calculating of a phase from the intensity change of the lights on a first position and a second position(S440). The information of the spot comprises a profile, distortion and illuminance.;COPYRIGHT KIPO 2011
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