HEATER BLOCK OF A RAPID THERMAL PROCESS DEVICE, CAPABLE OF PREVENTING A DEAD ZONE WITH AN EDDY AROUND A COOLANT INLET

摘要

PURPOSE: A heater block of a rapid thermal process device is provided to improve cooling efficiency by separately flowing coolants in an upper layer and a lower layer.;CONSTITUTION: A coolant distributer(140) is installed in an input part of a coolant inlet(111a,111b) to prevent a bottle neck. The coolant distributer prevents a dead zone with an eddy. The coolant inlet and a coolant outlet(112a,112b) are respectively installed in an upper layer and a lower layer to divide the flow of the coolant.;COPYRIGHT KIPO 2011