SYNTHESIS SYSTEM FOR SIC PARTICLES BY PLASMA(JET) AND SYNTHESIS METHODS

摘要

PURPOSE: A silicon carbide powder synthesizer using a plasma jet, and a synthesizing method silicon carbide powder of using thereof are provided to effectively form the silicon carbide powder with the small particle diameter. CONSTITUTION: A silicon carbide powder synthesizer using a plasma jet includes a chamber(100), a plasma torch(200), and a cyclone(400). The chamber includes a vacuum pump forming the vacuum condition. The plasma torch receives powder from the inside of the chamber to generate plasma, and mixed gas containing methyltrichloro silane using a mixed gas nozzle(210). The plasma torch also receives reaction gas containing argon through a reaction gas nozzle(220), for generating arc plasma.