AUTOMATED FILLET INSPECTION SYSTEMS WITH CLOSED LOOP FEEDBACK AND METHODS OF USE

摘要

Systems and methods for automated inspection of fillet formation along on or more peripheral edges (13a) of a packaged microelectronic device (14) that is attached to a supporting substrate (16), such system (10) including a feedback loop for controlling fillet formation More specifically, the system (10) includes a dispensing system (18) configured for dispensing underfill material (22) onto the supporting substrate (16) The system (19) further includes an automated optical inspection (AOI) system (19) configured for determining a value of a measurable attribute of the fillet (12), such as whether the fillet (12) is properly dimensioned, i e, sized and shaped A feedback loop (66) is included between the dispensing system (18) and automated optical inspection system (19).