DEVICE FOR GENERATING/DETECTING TERA HZ WAVE AND A MANUFACTURING METHOD THEREOF, CAPABLE OF MAXIMIZING PRODUCTIVITY BY REDUCING DIFFICULTY OF PACKAGING TECHNIQUES

摘要

PURPOSE: A device for generating/detecting tera Hz wave and a manufacturing method thereof are provided to lower costs for parts using an inexpensive plastic lens.;CONSTITUTION: An etch stopper layer(22) and a photo conductive layer(20) are formed on a substrate(10) with a first opening(12). First and second antenna electrodes(32,34) are formed on the photo conductive layer. A lens(40) is buried in the gap between the first and second antenna electrodes. The lens is bonded with an exposed surface of the photo conductive layer and surfaces of the first and second antenna electrodes. The lens is strongly bonded by a petrochemistrical adhesive.;COPYRIGHT KIPO 2011