MATERIAL FOR LOW TEMPERATURE SINTERED CERAMICS, THE LOW TEMPERATURE SINTERED CERAMICS, AND A MULTILAYER CERAMIC SUBSTRATE, CAPABLE OF SUPPRESSING THE DEVIATION OF THE SINTERING PROPERTY

摘要

PURPOSE: A material for low temperature sintered ceramics, the low temperature sintered ceramics, and a multilayer ceramic substrate are provided to prevent the generation of warpage and the waviness of the ceramics by controlling the content of iron and zirconium.;CONSTITUTION: A material for low temperature sintered ceramics is based on a SiO_2-BaO-Al_2O_3-based low temperature sintered ceramics material. 0.044 to 0.077 parts by weight of Fe, converted into Fe_2O_3, and 0.30 to 0.55 parts by weight of zirconium, converted into ZrO_2, are contained, based on the SiO_2-BaO-Al_2O_3-based low temperature sintered ceramics material. The SiO_2-BaO-Al_2O_3-based low temperature sintered ceramics material includes 47 to 60 weight% of SiO_2, 20 to 42 weight% of BaO, and 5 to 30 weight% of Al_2O_3. A multilayer ceramic substrate(1) includes a laminate(3) composed of a plurality of ceramic layers(2). One or more layers of the ceramic layers are composed of the low temperature sintered ceramics.;COPYRIGHT KIPO 2011