DEVICE FOR CHARGE AND UV ANALYSIS, CAPABLE OF ANALYZING ONE OF A POSITIVE CHARGE, A NEGATIVE CHARGE, AND UV

摘要

PURPOSE: A device for charge and UV analysis is provided to analyze one of a positive charge, a negative charge, and UV to monitor macro change related to process conditions.;CONSTITUTION: In a device for charge and UV analysis, a first device(M1) detects a change in a threshold voltage due to positive charge generation. A second device detects a change in a threshold voltage due to negative charge generation. A third device detects a change in a threshold voltage due to UV generation. A substrate(1) has one of first, second, third device thereon.;COPYRIGHT KIPO 2011