ROBOT FOR TRANSFERRING A WAFER, CAPABLE OF IMPROVING THE EFFICIENCY OF TEACHING

摘要

PURPOSE: A robot for transferring a wafer is provided to improve the transfer speed of the wafer by fixing the wafer mounted in a mounting unit by a certain force to transfer the wafer.;CONSTITUTION: In a robot for transferring a wafer, a mounting unit(150) comprises a guide groove(155) settling the wafer. The wafer transfer unit transfers the mounting unit. The wafer transfer unit comprises a power unit(110), a first robot arm(120a) and a second robot arm(120b). A wafer fixing unit makes the wafer closely contact to the one side of a guide groove. The wafer fixing unit includes an elastic unit maintaining the contact between a disc and a pusher.;COPYRIGHT KIPO 2011