LEAK DETECTOR AND LEAK DETECTION METHOD FOR AN AIRTIGHT CONTAINER, A PIPE, OR A VALVE

摘要

PURPOSE: A leak detector and a leak detection method are provided to efficiently test leak in a short time and to detect leak in an airtight container, a pipe, or a valve.;CONSTITUTION: A leak detector comprises a guide pipe(16) and a mass spectrometer(11). The guide pipe is inserted from a vacuum pump, in which test bodies are arranged, into an exhaust pipe(5). The guide pipe has an inlet(16a) opened in the flow direction of the exhaust pipe. The mass spectrometer is connected to the guide pipe through an opening and closing valve and detects helium. The guide pipe comprises a container unit(16b) arranged in the exhaust pipe.;COPYRIGHT KIPO 2011