SAMPLE HOLDER TWO-AXIS STAGE SYSTEM AND A TRANSFER METHOD OF THE SAMPLE HOLDER USING THE SYSTEM

摘要

PURPOSE: A sample holder two-axis stage system is provided to enable the rotation and movement of a sample holder to which a specimen is fixed in the direction of an axis of a sample holder.;CONSTITUTION: A sample holder two-axis stage system(10) comprises: a first driving unit(100) for rotating a first gear(110) around a first axis(120); a second gear(300) rotated by the first driving unit while going in gear with the first gear; a sample holder(200) to which a specimen is fixed; a transfer stage(400) in which the lower surface thereof is bent downward in a constant curvature; a body(500) in which the transfer stage is inserted; a ball bearing member equipped between the transfer stage and the body; and a second driving unit(700) for rotating the transfer stage around a third axis by the ball bearing member.;COPYRIGHT KIPO 2011