OBJECT WITH IMPROVED SUITABILITY FOR A PLASMA CLEANING PROCESS CAPABLE OF CLEANING AN OBJECT WELL

摘要

PURPOSE: An object with improved suitability for a plasma cleaning process is provided to reduce the number of steps for processing an object, thereby preventing an object from being contaminated again. ;CONSTITUTION: An object suitable for a plasma cleaning process is connected with a first outer surface area(SRF1) and a second outer surface area(SRF2). The object is connected to a detachable cover so that the detachable cover is connected to the object while the detachable cover covers the second outer surface area. The object connected to the detachable cover is cleaned in a plasma cleaning device so that the first outer surface area is cleaned without exposing the plasma cleaning device to the particles existing on the second outer surface area.;COPYRIGHT KIPO 2011