PHASE PLATE WITH AN IMPROVED HEATING MECHANISM FOR TEM CAPABLE OF ELIMINATING A TEM DISTORTION PHENOMENON

摘要

PURPOSE: A phase plate with an improved heating mechanism for TEM is provided to eliminate contaminants from a carbon film without generating an electric field. ;CONSTITUTION: A body unit is coupled with a TEM barrel. A carbon film is mounted on one end of an aperture plate. A heating unit(30) heats the aperture plate. A heat insulating connecting unit couples the body unit with the aperture plate. The heating unit is embedded in the body unit. The other end of the aperture plate is expanded into the body unit and contacts the heating unit.;COPYRIGHT KIPO 2011