DRY PUMPING SYSTEM FOR A TRANSFER-HOLDER OF T E M EQUIPPED WITH A THERMOMETER USING AN INFRARED IMAGING SYSTEM, CAPABLE OF INCREASING AUTOMATION WHILE EFFICIENTLY PERFORMING A PRELIMINARY TEST

摘要

PURPOSE: A dry pumping system for a transfer-holder of TEM equipped with a thermometer using an infrared imaging system is provided reduce unnecessary time by reducing a time for preprocessing of a cryo transfer holder. ;CONSTITUTION: In a dry pumping system for a transfer-holder of TEM equipped with a thermometer using an infrared imaging system, the internal space of a vacuum chamber is divided into a first vacuum chamber(2) and a second vacuum chamber(3). . The first vacuum chamber or the first vacuum chamber and the second vacuum chamber are exhausted through a vacuum pump(1). A vacuum port and an air valve thereof are installed in the second vacuum chamber.;COPYRIGHT KIPO 2011