SUBSTRATE TEST DEVICE WITH IMPROVED TEST ACCURACY AND SIMPLIFIED CONTROL AND A SUBSTRATE TEST METHOD USING THE SAME

摘要

PURPOSE: A substrate test device and a substrate test method using the same are provided to reduce the number of grating transfer units by grating units arranged on the same grating plane through a single grating transfer unit. ;CONSTITUTION: A substrate test device comprises illumination modules(100), a grating transfer unit(300), an image pickup module(400), and a control unit. Each illumination module includes an illumination unit(110), a grating unit(120) which changes the light generated by the illumination unit to the grating pattern light, and a projection lens for projecting the grating pattern light to a substrate being tested. The grating transfer unit simultaneously controls the grating units of the illumination modules predetermined times. The image pickup module photographs the grating pattern lights reflected off the substrate. The control unit inspects the substrate using the images obtained by the image pickup module.;COPYRIGHT KIPO 2011