PARTICLE MEASUREMENT APPARATUS FOR EASILY MEASURING THE DISTRIBUTION OF POLLUTANT PARTICLES IN THE ENTIRE INTERNAL SPACE OF A CLEAN ROOM FACILITY

摘要

PURPOSE: A particle measurement apparatus is provided to improve the measurement accuracy by preventing particles existing inside a main pipe from flowing into a light generating part and a light detecting part. ;CONSTITUTION: A particle measurement apparatus comprises a main pipe(100), a light generating part, a light detecting part, and a connection pipe(400). The main pipe is coupled to the middle of an air line of clean room equipment to be communicated with the air line. The light generating part is connected to the main pipe and generates incident light to form a focus in the internal space of the main pipe. The light detecting part is connected to the main pipe to be aligned with the light generating part and receives/detects scattered light generated by the collision between the incident light and the particles which pass through the focal region of the incident light. The connection pipe is installed between the main pipe and the light generating part and between the main pipe and the light detecting part to connect the light generating part and the light detecting part to the main pipe at certain intervals.;COPYRIGHT KIPO 2011