SILICON MONOCRYSTAL INGOT FORMING APPARATUS AND A HEATING FURNACE ASCENDING/DESCENDING UNIT OF THE SAME CAPABLE OF EASILY PERFORMING REPLACEMENT OF AN ABNORMAL SEPARATE MOTOR AND DRIVE TRANSMITTER PART

摘要

PURPOSE: A silicon monocrystal ingot forming apparatus and a heating furnace ascending/descending unit of the same are provided to minimize vibrations during ascending and descending of the heating furnace, thereby reducing maintenance cost.;CONSTITUTION: A supporting frame(310) is comprised of a guide post connected vertically between the upper and lower part of a supporting panel and located in the lower part of a reacting chamber. An elevation body(330) is moving up and down with the guide post as an axis. The upper part of the elevation body is connected to the lower part of a shaft of a furnace. A body connecting part(332) is extended in one side of the elevation body. A ball screw(340) is installed between the upper and lower part of the supporting panel in parallel with the guide post in order to be rotated about an axis. A first motor part(M1) is included in the lower part of the ball screw and rotates the ball screw with low speed. The ball nut is connected in the inner side of the body connecting part with a bearing and interlocked to move the elevation body up and down. One axis part of a drive transmitter part is connected to the lower side of the ball nut and installed in order to rotate the ball nut through the torque of the other parallel axis part. A second motor part(M2) is included in the outside of the body connecting part and rotates the other axis part of the drive transmitter part with high speed. The first and second motor units operate individually and are comprised in order to adjust the ascending/descending speed of the furnace.;COPYRIGHT KIPO 2011