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TERAHERTZ OSCILLATOR AND MANUFACTURING METHOD OF AN ELECTRON EMISSION SOURCE CAPABLE OF FORMING AN ELECTRON BEAM FOCUSING STRUCTURE FOR HIGH CURRENT DENSITY
TERAHERTZ OSCILLATOR AND MANUFACTURING METHOD OF AN ELECTRON EMISSION SOURCE CAPABLE OF FORMING AN ELECTRON BEAM FOCUSING STRUCTURE FOR HIGH CURRENT DENSITY
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机译:能够形成高电流密度电子束聚焦结构的电子发射源的TERAHERTZ振荡器和制造方法
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摘要
PURPOSE: A terahertz oscillator and a manufacturing method of an electron emission source are provided to make a bent cathode in the electron emission source, thereby focusing emitted electron beam from the electron emission source in a sheet beam form.;CONSTITUTION: An electron emission source(15) is formed on a first insulating layer(120). The electron emission source includes a cathode in order to emit an electron beam. An anode(16) is successively arranged on the first insulating layer along the emission direction of the electron beam. An oscillator circuit(17) converts the energy of the electron beam into the energy of an electromagnetic wave. A collector(18) collects the electron beam. An output unit(19) emits the electromagnetic wave created in the oscillator circuit to the outside. The cathode includes a first curvature part which is bent in the vertical direction of the first insulating layer. An electron emissive material layer is formed inside of the first curvature part.;COPYRIGHT KIPO 2011
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