VACUUM VALVE SLOW EXHAUST TEST APPARATUS CAPABLE OF AUTOMATICALLY EXECUTING AN ACCURATE SLOW EXHAUST TEST AND A SLOW EXHAUST TEST METHOD

摘要

PURPOSE: A vacuum valve slow exhaust test apparatus and a slow exhaust test method are provided to guarantee the continuity of a test by automatically executing a performance measurement on a slow exhausting function and to reduce test costs.;CONSTITUTION: Slow exhaust related set values are received and are stored in a memory unit(303). The pressure value of a vacuum chamber is checked and a vacuum valve is opened according to a fixed exhaust rate while starting slow ventilation. Whether the pressure value of the vacuum chamber is changed to the fixed exhaust rate for a fixed time interval is checked and the vacuum valve is opened again at the fixed time interval when reaching a fixed pressure variation value. Whether the pressure value of the vacuum chamber reaches a target pressure value or not is checked when a final time interval is reached.;COPYRIGHT KIPO 2012