THIN FILM GAS SENSOR USING AN OXIDE HAVING A LARGE SURFACE, HIGH RELIABILITY, AND A THREE-DIMENSIONAL STRUCTURE, AND MANUFACTURING METHOD THEREOF USING A MINUTE TEMPLATE

摘要

PURPOSE: A thin film gas sensor using an oxide having a large surface, high reliability, and a three-dimensional structure, and a manufacturing method thereof are provided to obtain high gas sensitivity and rapid response speed compared to an existing gas sensor.;CONSTITUTION: A manufacturing method of a thin film gas sensor using an oxide having a large surface, high reliability, and a three-dimensional structure is as follows. The surface of a substrate is processed. A minute template having a large surface is manufactured by spreading a colloid solution on the surface of the substrate. An oxide thin film is spread on the top of the minute template having the large surface.;COPYRIGHT KIPO 2012