OVERLAY VERNIER AND METHOD FOR MEASURING AN OVERLAY CAPABLE OF IMPROVING AN OVERLAY

摘要

PURPOSE: An overlay vernier and a method for measuring an overlay are provided to accurately measure the overlay by collecting the measurement result of six or more overlays.;CONSTITUTION: A main scale(100) includes a long stem unit and a plurality of branch units(120). The plurality of branch units is separately extended in one direction of the stem unit and forms concave units. A sub scale(200) has the same shape as the main scale to make the branch unit of the main scale face the concave unit of the sub scale.;COPYRIGHT KIPO 2012