ELECTRIC CHARGED PARTICLE BEAM DRAWING DEVICE CAPABLE OF IMPORCVING LINEWIDTH UNIFORMITY AND AN ELECTRIC CHARGED PARTICLE BEAM DRAWING METHOD

摘要

PURPOSE: An electric charged particle beam drawing device and an electric charged particle beam drawing method are provided to improve correction accuracy by introducing a correction term depending on proximity effect density.;CONSTITUTION: A drawing part(150) comprises an electronics telescopic(102) and drawing room(103). An electron gun(201), an illumination lens(202), and a blanker(212) are included within the electronics telescopic. An XY stage(105) which is transferable in an XY direction is arranged within the drawing room. A sample(101) is arranged on the XY stage. A controller(160) comprises a control computing(110), a memory(112), and a deflection control circuit(120). A dosage operation unit(18), a drawing data processing unit(22), and a density operation unit(24) are arranged within the control computing.;COPYRIGHT KIPO 2012