Method of manufacturing the cross type magnetic array sensors for biomolecules magnetic bead detection

摘要

highly sensitive and detects the magnetic bead with a constant cross-shaped structure of the various forms that can be used as a high-density magnetic biosensor proposes a method for manufacturing the array elements. Proposed method is able to produce a constant cross-shaped magnetic bead detection element array to measure the output voltage of the vertical direction that is perpendicular to the applied current in the cross direction. Information cross magnetic beads produced in this way is because the sensing element array to measure the sensitivity of the magnetic field variation as compared to the magnetic bead detection device for measuring the output voltage in the direction parallel to the original direction of the applied current, the signal-to-noise ratio is high magnetic beads magnetic field sensing elements is possible. In addition, sub-magnetic bead cross sensing array device can, by applying current-induced magnetic field generated by the applied current without externally applied magnetic field due to measure the voltage of the vertical magnetization to the magnetic beads. The magnetizing field is because it affects the sensitivity to the external applied magnetic field perpendicular voltage allows easy implementation of unnecessary magnetic biosensor. Thus, by using a magnetic bead positive cross sensing array device having a high density and high sensitivity of the magnetic biosensor is possible.