INGOT GROWER, CAPABLE OF EXPANDING THE LIFETIME OF A MAGNETIC FLUID SEALING PART SEALING A CHAMBER

摘要

PURPOSE: An ingot grower is provided to maintain a sealing state while ingot is being grown for a long period of time by blocking heat transmitted to a magnetic fluid sealing part in order to protect the magnetism of magnetic fluid.;CONSTITUTION: A hole(112) is installed at the lower side of a chamber(110). A rotating part(120) includes a crucible(150) growing ingot(152) and a shaft(160) supporting the crucible. A housing(130) includes a magnetic fluid sealing part hermetically seals the chamber. A rotary joint(140) is combined with the housing at the lower part of the housing. The rotary joint introduces cooling fluid from the outside into the introduction tube(170) of the rotating part.;COPYRIGHT KIPO 2011