Cavity of diaphragm compressor and design method for cavity shape

摘要

PURPOSE: A cavity of a diaphragm type compressor and a method of designing the shape of the cavity are provided to prevent the damage of a diaphragm and to extend the durability and the lifespan of the diaphragm. CONSTITUTION: A metal diaphragm connected to an actuator across the internal space of a cavity of a diaphragm type compressor is installed and the gas is compressed by the metal diaphragm moved by the reciprocating of the actuator to have the high pressure. The cavity has a given vertical cross-sectional shape. The vertical cross-sectional shape is similar to a looped curve(400). The looped curve is formed by drawing shape forming curves(300,320,340,360) on second to fourth quadrants using the X-axis and Y-axis as symmetric axes. The stress applied to the diaphragm making tight contact with the surface of the cavity is reduced by the actuator.