The present invention relates to an ozone gas generator and a method for a semiconductor, comprising: a temperature control sensor positioned between an OZT and a heater to sense a temperature, and a drive control signal to read a sensed temperature value to reach a set temperature value by itself A temperature control unit providing a temperature control unit, a silicon control rectifier (SCR) that is driven according to a driving control signal to control the heater power, and generates heat to reach a temperature value set under a condition that moisture is not generated according to the power control of the SCR. It includes a heater. Therefore, it is possible to solve the problem that causes the shortened life of the existing OZT. Therefore, there is an effect that can reduce the operating cost by extending the replacement cycle of the OZT component that is the ozone gas decomposition device.;Temperature sensor, OZT, SCR, heater, temperature control
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