ZNO DOUBLE LAYER TRANSPARENT CONDUCTIVE ELECTRODE, MANUFACTURING METHODE THEREOF AND SOLAR CELL USING THE SAME

摘要

PURPOSE: A ZnO dual structure transparent electrode, a manufacturing method thereof, and a solar cell using the same are provided to increase electric energy with low costs by forming a dual transparent electrode. CONSTITUTION: A ZnO layer of a texture structure is formed on a glass substrate(500) in a (110) direction. A ZnO layer with high electric conductivity is formed on the texture ZnO layer in a (100) or (101) direction. The ZnO layer in the (100) or (101) direction is contacted with a light absorbing layer. The ZnO layer in the (110) direction and the ZnO layer in the (100) or (101) direction are made with a CVD(Chemical Vapor Deposition) method.