Pyrolysis combined process combined with adsorption concentration system to effectively decompose fluorine-containing gas emitted from semiconductor production process

摘要

PURPOSE: A hybrid thermal destruction processes coupled with adsorptive enriched units for the removal of perfluorocompounds gases from semi-conductor production industry is provided to reduce the amount of the process energy by heat-dissolving the concentrated perfluorocompounds by incineration and plasma. CONSTITUTION: The fluorinated gas(S1) is adsorbed by the absorbent from the exhaust gas. The absorbed fluorinated gas is detached from the absorbent. The detached perfluorinated gas is removed by the thermal process. The absorbent is the compound of one or two kinds selected output the A1216 activated charcoal, the A836 activated charcoal, and the A1261 activated charcoal.