TREATMENT AND REUSE SYSTEM FOR WASTEWATER CONTAINING HIGH CONCENTRATIONS OF HYDROFLUORIC ACID, PHOSPHORIC ACID AND NITRIC ACID

摘要

The present invention relates to a method and apparatus for treating and recycling wastewater containing high concentrations of hydrofluoric acid, phosphoric acid, and nitric acid generated in the semiconductor industry and the metal industry, and more particularly, comprising two chemical reactors and a bioreactor. Treatment of hydrofluoric acid, phosphoric acid, and nitric acid is carried out in sequence, and dehydration efficiency is provided by installing a dehydration device between the two chemical reaction tanks to dehydrate the treated water and sludge discharged from the sedimentation tank of the second chemical reaction tank together. It is possible to omit one precipitation tank installed at the rear end of the first chemical reaction tank, and to add the acetic acid as a neutralizer to the second chemical reaction tank to lower the TDS of the incoming water introduced into the biological reaction tank, and to remove residual acetic acid from the bioreactor. By utilizing as an organic source, not only can the methanol injection amount be reduced, but also the reverse osmosis That can reduce and relates to a high-concentration hydrofluoric acid, waste water treatment and recycling apparatus including phosphoric acid and nitric acid.