Recycle of Silicon Sludge and Manufacturing Method of Sintered SiC Body Using the same

摘要

to a method for producing a silicon carbide sintered body from waste sludge . The present invention includes the steps of providing a silicon sludge generated in a silicon wafer cutting step ; Removing a portion of the oil by heat-treating the silicon sludge ; Mixing and forming the silicon sludge and carbon ; And scattering provides a method for producing a sintered body of silicon carbide from the silicon wafer sludge generated during cutting comprising the step of sintering the mixture at a temperature of the chemical reaction atmosphere and 1300 ~ 1900 . According to the present invention , the total amount of processing can be generated in a semiconductor wafer of silicon sludge processing plants , and a low manufacturing cost , and it is possible to provide an economical method for producing a carbide of the added value .