PROTECTIVE CASE ELECTROMECHANICAL MICROSYSTEMS CONTAINING intermediate relay WIRE

摘要

FIELD: measurement equipment.;SUBSTANCE: invention refers to measurement equipment and can be used for example in microgyrometres, microaccelerometres, and pressure microsensors. At that, protective housing is formed with the wall made from electrical insulating material and forming a closed chamber. The above wall has inner surface oriented inward the chamber and outer surface being in contact with environment. Internal electric contacts located on inner surfaces and external electric contacts located on outer surfaces are electrically connected in pairs to each other. The first surface of flat electromechanical microsystem is fixed on internal wall of housing, and the other one includes electrical contacts of this microsystem. The first end of wire connection made from conductive material is fixed on electric contact of microsystem. Intermediate translator is made from electric insulating material, fixed at least on internal wall and contains the tracks made from conductive material; at that, one such electroconductive track is electrically connected at least to one internal electric contact and to the other end of wire connection.;EFFECT: higher reliability, which is provided owing to using the intermediate wiring translator in protective housing of electromechanical microsystem.;10 cl, 4 dwg