A method of manufacturing a vibrating element to quartz crystal, quartz crystal vibrator, oscillator, electronic and radio controlled clock.

摘要

The invention aims to provide a method for manufacturing a vibrating element to small quartz crystal. This process reduces the process variations due to the vagueness of the correspondence between the front and back of a mask during the etching of a quartz crystal wafer. According to this method for manufacturing a vibrating element quartz crystal to be processed by etching a quartz crystal wafer (20) from the front and from the rear, the dimension of a mask (61 , 62) used for etching is changed according to the front and rear of the quartz crystal wafer, a small mask is defined as a reference mask (61) and a large-sized mask (62) is defined as a relative mask (62), so as to perform etching. The mask is adjusted to the dimension to be treated from the reference mask (61) by further etching, a uniform processing accuracy can be obtained, the vibrating element to small quartz crystal can be manufactured and provided economic and stably.