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Device for contacting for the test of at least one test object, test system and method for testing of test objects

机译:用于接触至少一个测试对象的测试的装置,测试系统和测试对象的测试方法

摘要

A method for testing of test objects on a substrate (140) with a plurality of test objects (301; 401), wherein for testing a test device with an optical axis (102) and a to the optical axis associated test - range is used, with the following steps:– laying of the substrate on a holder (130);– contacting a first test object with a contacting unit (150) which a maximum of the dimension of the half of the holder dimension in a direction perpendicular to the optical axis;– positioning of the substrate (140) and the optical axis (102) relative to one another, so that a first area (303) of the first test object in the test - area (302) of the test device is;– testing of the first region of the test object;– displacement of the substrate and the optical axis relative to one another, so that at least a further region (304) of the first test object in the test - region of the test device, the contacting unit is displaced, so that the position of the contacting unit in relation to the..
机译:一种用于在具有多个测试对象(301; 401)的基板(140)上测试测试对象的方法,其中用于测试具有光轴(102)和与光轴相关联的测试范围的测试设备,通过以下步骤:–将基板放在支架(130)上; –使第一测试对象与接触单元(150)接触,该接触单元在垂直于支架的方向上最大为支架尺寸的一半。 -光轴;-基板(140)和光轴(102)相对于彼此的定位,使得在测试中的第一测试对象的第一区域(303)-测试装置的区域(302); –测试对象的第一区域的测试; –基板和光轴相对于彼此的位移,以便测试中第一测试对象的至少另一个区域(304)–测试设备的区域,接触单元移位,使得接触单元相对于接触单元的位置。

著录项

  • 公开/公告号DE10253717B4

    专利类型

  • 公开/公告日2011-05-19

    原文格式PDF

  • 申请/专利权人

    申请/专利号DE2002153717

  • 发明设计人

    申请日2002-11-18

  • 分类号G01R31/305;G01R31/302;G01N21/88;

  • 国家 DE

  • 入库时间 2022-08-21 17:48:04

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