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Device for contacting for the test of at least one test object, test system and method for testing of test objects
Device for contacting for the test of at least one test object, test system and method for testing of test objects
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机译:用于接触至少一个测试对象的测试的装置,测试系统和测试对象的测试方法
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摘要
A method for testing of test objects on a substrate (140) with a plurality of test objects (301; 401), wherein for testing a test device with an optical axis (102) and a to the optical axis associated test - range is used, with the following steps:– laying of the substrate on a holder (130);– contacting a first test object with a contacting unit (150) which a maximum of the dimension of the half of the holder dimension in a direction perpendicular to the optical axis;– positioning of the substrate (140) and the optical axis (102) relative to one another, so that a first area (303) of the first test object in the test - area (302) of the test device is;– testing of the first region of the test object;– displacement of the substrate and the optical axis relative to one another, so that at least a further region (304) of the first test object in the test - region of the test device, the contacting unit is displaced, so that the position of the contacting unit in relation to the..
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