Power supplying method for plasma load, involves immediately supplying produced alternating signal to load without intermediate switching of oscillation circuit and extinguishing arc by controlling switching elements during detection of arc

摘要

The method involves producing an alternating signal from a direct signal using a switch bridge (12) in a normal operation. The produced alternating signal is immediately supplied to a plasma load without intermediate switching of an oscillation circuit. A condition of the plasma load is monitored. An arc is extinguished by controlling switching elements (U1-U4) i.e. MOSFETS, of the bridge during detection of the arc. A preset current value is set at an output of the bridge for preset time in the extinguishing operation and voltage reversal is taken place at the output after the preset time. An independent claim is also included for a plasma supplying device.