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Micro-electromechanical component for component system, has micro-electromechanical structure, buffer capacity for smoothing external supply voltage and two inlets
Micro-electromechanical component for component system, has micro-electromechanical structure, buffer capacity for smoothing external supply voltage and two inlets
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机译:用于组件系统的微机电组件,具有微机电结构,用于平滑外部电源电压的缓冲容量和两个入口
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摘要
The micro-electromechanical component (1) has a micro-electromechanical structure (5), a buffer capacity (10) for smoothing an external supply voltage and two inlets (6a,6b). The buffer capacity is externally connectable over both inlets. An independent claim is also included for a component system.
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