Gas analyzing sensor for detecting and analyzing gas phase-reactions with solid-state surface, has inner and outer pipes, where gas flow is performed in space between pipes, and gas flow in outer pipe is greater than gas flow in inner pipe

摘要

The sensor has an inner pipe arranged in an outer pipe in an input of the sensor. The inner pipe is provided with a low conductance value, and an intermediate space is formed between the inner pipe and the outer pipe. The inner pipe is removed from an end of the outer pipe about three-times of inner diameter of the outer pipe. Gas flow is performed in the intermediate space between the inner and outer pipes, where the gas flow in the outer pipe is greater than the gas flow in the inner pipe. Gas analysis is performed at an output of the sensor with a mass spectrometer.