Process for coating a substrate with aluminum-doped zinc oxide

摘要

The invention relates to a method for coating a substrate with aluminum-doped zinc oxide, comprising the steps of generating a nucleation layer containing zinc oxide or doped, in particular aluminum-doped, zinc oxide on the surface of the substrate by sputtering a solid target; - Production of a cover layer which grows more or less epitaxially on the nucleation layer and which contains aluminum-doped zinc oxide; and wet-chemical etching of the cover layer.