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Use of the specific resistance measurement for indirect determination of the purity of silanes and germanes and a corresponding method
Use of the specific resistance measurement for indirect determination of the purity of silanes and germanes and a corresponding method
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机译:使用电阻率测量法间接确定硅烷和锗烷的纯度以及相应的方法
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摘要
The present invention relates to a method for the indirect determination of the purity of silanes and germanics using a device for measuring the specific resistance. The invention further relates to a plant for the industrial production and / or filling of silanes or germanics including a quality control in which a device for measuring the specific resistance is used.
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