Inductive coupled plasma torch used for forming coatings and/or depositions on silica glasses in optical industry, has dielectric envelope which is provided with porous structure that is flow through-able by fluid

摘要

The inductive coupled plasma torch has torch channel (1) which surrounds the induction coil (2) with dielectric envelope (3). The dielectric envelope is provided with a porous structure (4) which is flow through-able by fluid (5). The porous structure is flow through-able towards the longitudinal axis of induction coil and towards the torch channel. The porous structure is provided with an aperture leading into the torch channel.