Alignment device for positioning and/or adjustment of mirror position sensor in projection exposure system for microlithography, has evaluation unit comparing image of mirror position sensor captured by camera with reference image

摘要

The device has a camera (25) for capturing an image of a mirror position sensor in a three-dimensional space, and a distance sensor (26) for determining the distance of the sensor. An evaluation unit compares the image captured by the camera with a reference image, and compares the determined distance value with a reference value, where the camera and the distance sensor are arranged in a defined way with respect to a reference element (21). An independent claim is also included for a method for positioning and/or adjustment of a mirror position sensor in a three-dimensional space.